In transmission electron microscopy (TEM) analysis, the primary and crucial step in obtaining a high-quality image that can be interpreted reasonably is sample preparation. Inappropriate sample thickness, poor conductivity, or damage introduced during sample preparation can directly lead to abnormal electron beam penetration, image distortion, and even sample scrapping.
TEM sample requirements
① The sample should generally be a solid with a thickness less than 100 nm;
② The sample will not be sucked out and attached to the pole shoe under the action of electron microscopy electromagnetic field;
③ The sample can maintain stability in high vacuum;
④ If the sample does not contain moisture or other volatile substances, it should be dried first.
Second. Preparation of bulk samples
The preparation of bulk samples usually involves electrolytic double spraying, ion thinning FIB、 Prepare thin film samples below 100nm using ultra-thin or frozen slicing, and then conduct testing.
① Electrolytic dual spray
The electrolytic double spray method has a simple process, easy operation, and low cost; The central thin area has a large range, making it easy for electron beams to penetrate; But it is required that the sample is conductive, and once it is made, the sample must be immediately removed and rinsed multiple times in distilled water, otherwise the electrolyte will continue to corrode the thin area, damage the sample, and even render the sample useless. If the sample cannot be observed under an electron microscope in a timely manner, it should be stored in glycerol, acetone, or anhydrous alcohol.
② Ion thinning
Principle: Ar ion beam bombards the sample at a certain inclination angle (5-30) to thin it;
Object: brittle materials such as ceramics and intermetallic compounds, which require a long time, usually around ten hours or even longer, and have low work efficiency;
Applicable conditions: The ion thinning method can be applied to various materials; The temperature is high during the thinning process and is not suitable for heat sensitive materials.
Focused lon beam (FIB) is a microscopic cutting instrument that uses an electric lens to focus an ion beam into a very small size. At present, the ion beam used in commercial systems is a liquid-phase metal ion source, and the metal material is gallium (Ga), because gallium has a low melting point, low vapor pressure, and good oxidation resistance; The use of an external electric field (Suppressor) on a liquid metal ion source can form small tips of liquid gallium, and a negative electric field (Extractor) can be used to pull the gallium at the tip, resulting in the emission of a gallium ion beam. The beam is focused by an electric lens, and the size of the ion beam can be determined by a series of aperture changes. After a second focusing, it is directed to the surface of the specimen, and physical collision is used to achieve the purpose of cutting.
④ Ultra-thin slice
Ultrathin sectioning is a section used for electron microscopy observation. Due to the low ability of electrons to penetrate tissues, ultra-thin slices (generally 80-100nm thick) are required for electron microscopy observation, mainly for the preparation of biological samples, polymer materials, micro nano particles, rubber and other materials.
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